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BS ISO 16413:2013

Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

General Information

Status : WITHDRAWN
Standard Type: Main
Document No: BS ISO 16413:2013
Document Year: 2013
Pages: 42
  • Section Volume:
  • GBM05 Sciences & Healthcare (GMB05)

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WITHDRAWN
BS ISO 16413:2013
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