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BS ISO 16413:2020

Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

General Information

Status : Definitive
Standard Type: Main
Document No: BS ISO 16413:2020
Document Year: 2020
Pages: 42
  • Section Volume:
  • GBM05 Sciences & Healthcare (GMB05)

Life Cycle

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Definitive
BS ISO 16413:2020
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