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BS ISO 12406:2010

Surface chemical analysis. Secondary-ion mass spectrometry. Method for depth profiling of arsenic in silicon

General Information

Status : Confirmed
Standard Type: Main
Document No: BS ISO 12406:2010
Document Year: 2010
Pages: 24
  • Section Volume:
  • GBM38 Chemical Technology (GMB38)

Life Cycle

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Confirmed
BS ISO 12406:2010
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