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Status : Active
Standard Type : Main
Document No : ISO/TR 15969:2021
Document Year : 2021
Pages : 13
Edition : 2
Section Volume : Depth profiling (ISO/TC 201/SC 4.)
The methods of sputtered depth measurement described in this document are applicable to techniques of surface chemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to a typical sputtered depth of up to several micrometres. The depth typically determined by this approach is between 1 nm to 500 µm.