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BS ISO 17331:2004+A1:2010

Surface chemical analysis. Chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy

General Information

Status : Definitive
Standard Type: Main
Document No: BS ISO 17331:2004+A1:2010
Document Year: 2004
Pages: 28
  • Section Volume:
  • GBM38 Chemical Technology (GMB38)

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Definitive
BS ISO 17331:2004+A1:2010
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