ASTM E983 : 94(1999)

Standard Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy

Standard Details

1.1 This guide outlines the origins and manifestations of unwanted electron beam effects in Auger electron spectroscopy (AES).

1.2 Some general guidelines are provided concerning the electron beam parameters which are most likely to produce these effects.

1.3 General classes of materials are identified which are most likely to exhibit unwanted electron beam effects. In addition, a tabulation of some specific materials which have been observed to undergo electron damage effects is provided.

1.4 A simple method is outlined for establishing the existence and extent of these effects during routine AES analysis.

1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

General Information

Status : Historical

Standard Type: Main

Document No: ASTM E983 : 94(1999)

Document Year: 1994

Pages: 4

Section Volume:
03.06 Volume 03.06 Molecular Spectroscopy and Separation Science; Surface Analysis
03.06 Volume 03.06 Molecular Spectroscopy and Separation Science; Surface Analysis
03.06 Volume 03.06 Molecular Spectroscopy and Separation Science; Surface Analysis