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BS IEC 63068-4:2022

Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices - Procedure for identifying and evaluating defects using a combined method of optical inspection and photoluminescence

General Information

Status : Definitive
Standard Type: Main
Document No: BS IEC 63068-4:2022
Document Year: 2022
Pages: 28
  • Section Volume:
  • GBM21 Electronic Components & Devices (GMB21)

Life Cycle

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Definitive
BS IEC 63068-4:2022
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