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BS IEC 62047-52:2026

Semiconductor devices - Micro-electromechanical devices - Part 52: Biaxial tensile testing method for stretchable MEMS

General Information

Status : Definitive
Standard Type: Main
Document No: BS IEC 62047-52:2026
Document Year: 2026
Pages: 18
  • Section Volume:
  • GBM21 Electronic Components & Devices (GMB21)

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Definitive
BS IEC 62047-52:2026
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