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IEC 62047-32:2019 (EN-FR)

Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators

Standard Details

IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.

General Information

Status : ACTIVE
Standard Type: Main
Document No: IEC 62047-32:2019 (EN-FR)
Document Year: 2019
Pages: 37
Edition: 1.0

Life Cycle

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IEC 62047-32:2019 (EN-FR)
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