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Standard Type : Main
Document No : ISO 22493:2014
Document Year : 2014
Pages : 20
Edition : 2
Section Volume : Terminology (ISO/TC 202/SC 1.)
ISO 22493:2014is applicable to all standardization documents relevant to the practice of SEM. In addition, some clauses of ISO 22493:2014 are applicable to documents relevant to related fields (e.g. EPMA, AEM, EDS) for the definition of terms which are relevant to such fields.