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ISO 23131-3:2026

Ellipsometry — Part 3: Transparent single layer model

Standard Details

This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.

General Information

Status : Published
Standard Type: Main
Document No: ISO 23131-3:2026
Document Year: 2026
Pages: 29
Edition: 1
  • Section Volume:
  • ISO/TC 107. Metallic and other inorganic coatings
  • ICS:
  • 17.020 Metrology and measurement in general

Life Cycle

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ISO 23131-3:2026
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