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Status : Withdrawn
Standard Type : Main
Document Year : 2022
Pages : 11
Edition : 1
Section Volume : Vacuum technology (ISO/TC 112.)
This document defines terms related to spinning rotor gauges (SRGs), specifies the necessary parameters for SRGs, details their calibration procedure and describes which measurement uncertainties to consider when operating these gauges. This document is applicable to pressure up to 2 Pa.