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ISO 20146:2019

Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges

Standard Details

This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes which measurement uncertainties have to be considered when operating these gauges.

This document complements ISO 3567 and ISO 27893 when calibrating CDGs and using them as reference standards.

General Information

Status : Published
Standard Type: Main
Document No: ISO 20146:2019
Document Year: 2019
Pages: 16
Edition: 1

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ISO 20146:2019
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