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ISO 3530:1979

ISO 3530:1979

Vacuum technology — Mass-spectrometer-type leak-detector calibration

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General Information

Status :

Active

Standard Type : Main

Document No : ISO 3530:1979

Document Year : 1979

Pages : 10

Edition : 1

Section Volume : Leak detection methods (ISO/TC 135/SC 6.)

ICS : Vacuum technology (23.160)

Only leak detectors are described which have an integral high vacuum system to maintain the sensing element of the mass spectrometer at a low pressure. Two procedures are outlined, one to determine the minimum detectable leak rate and the other for determination of the minimum detectable concentration ratio.