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Status : Active
Standard Type : Main
Document No : ISO 14606:2022
Document Year : 2022
Pages : 17
Edition : 3
Section Volume : Depth profiling (ISO/TC 201/SC 4.)
This document gives guidance and requirements on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials, in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry.
This document is not intended to cover the use of special multilayered systems such as delta doped layers.