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Status : Active
Standard Type : Main
Document No : ISO 20341:2003
Document Year : 2003
Pages : 5
Edition : 1
Section Volume : Secondary ion mass spectrometry (ISO/TC 201/SC 6.)
ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials.
It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.