Knowledge Gateway
Unlock your learning potential with industry insights and standards that matter. Share your email to begin.
Unlock your learning potential with industry insights and standards that matter. Share your email to begin.
Status : Withdrawn
Standard Type : Main
Document No : ISO 11952:2014
Document Year : 2014
Pages : 58
Edition : 1
Section Volume : Scanning probe microscopy (ISO/TC 201/SC 9.)
ISO 11952:2014 specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.