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BS ISO 14706:2014

Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy

General Information

Status : Confirmed
Standard Type: Main
Document No: BS ISO 14706:2014
Document Year: 2014
Pages: 36
  • Section Volume:
  • GBM38 Chemical Technology (GMB38)

Life Cycle

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Confirmed
BS ISO 14706:2014
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