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ISO 18118 : 2024

Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials

Standard Details

This document gives guidance on the measurement and use of experimentally-determined relative sensitivity factors for the quantitative analysis of homogeneous materials by Auger electron spectroscopy and X-ray photoelectron spectroscopy. The methods described only apply to polycrystalline and amorphous materials, as effects inherent to single-crystal samples are not addressed.

General Information

Status : Published
Standard Type: Main
Document No: ISO 18118 : 2024
Document Year: 2024
Pages: 22
Edition: 3

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ISO 18118 : 2024
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