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Status : Active
Standard Type : Main
Document No : ISO 18118 : 2024
Document Year : 2024
Pages : 22
Edition : 3
Section Volume : Electron spectroscopies (ISO/TC 201/SC 7.)
This document gives guidance on the measurement and use of experimentally-determined relative sensitivity factors for the quantitative analysis of homogeneous materials by Auger electron spectroscopy and X-ray photoelectron spectroscopy. The methods described only apply to polycrystalline and amorphous materials, as effects inherent to single-crystal samples are not addressed.