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ASTM E986 : 04(2024)

Standard Practice for Scanning Electron Microscope Beam Size Characterization

Standard Details

1.1 This practice provides a reproducible means by which one aspect of the performance of a scanning electron microscope (SEM) may be characterized. The resolution of a

General Information

Status : ACTIVE
Standard Type: Main
Document No: ASTM E986 : 04(2024)
Document Year: 2004
Pages: 3
  • Section Volume:
  • 03.01 Volume 03.01 Metals -- Mechanical Testing; Elevated and Low-Temperature Tests; Metallography
  • ICS:
  • 31.120 Electronic display devices

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ASTM E986 : 04(2024)

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