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BS EN 62047-21:2014

Semiconductor devices. Micro-electromechanical devices - Test method for Poisson's ratio of thin film MEMS materials

General Information

Status : Definitive
Standard Type: Main
Document No: BS EN 62047-21:2014
Document Year: 2014
Pages: 18
  • Section Volume:
  • GBM21 Electronic Components & Devices (GMB21)

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Definitive
BS EN 62047-21:2014
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