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BS EN 62047-8:2011

Semiconductor devices. Micro-electromechanical devices - Strip bending test method for tensile property measurement of thin films

General Information

Status : Definitive
Standard Type: Main
Document No: BS EN 62047-8:2011
Document Year: 2011
Pages: 22
  • Section Volume:
  • GBM21 Electronic Components & Devices (GMB21)

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Definitive
BS EN 62047-8:2011
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