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DIN

VDI/VDE 2655 Blatt 1.3 : 2020

Optical metrology of microtopographies - Calibration of interferometers and interference microscopes for form measurement

General Information

Status : ACTIVE
Standard Type: Main
Document No: VDI/VDE 2655 Blatt 1.3 : 2020
Document Year: 2020
  • ICS:
  • 17.180.01 Optics and optical measurements in general

Life Cycle

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ACTIVE
VDI/VDE 2655 Blatt 1.3 : 2020
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