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IEC TR 63258:2021

Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films

Standard Details

IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.

General Information

Status : ACTIVE
Standard Type: Main
Document No: IEC TR 63258:2021
Document Year: 2021
Pages: 21
Edition: 1.0
  • Section Volume:
  • TC 113 Nanotechnology for electrotechnical products and systems

Life Cycle

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IEC TR 63258:2021
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