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IEC TS 62607-6-5:2022

Nanomanufacturing - Key control characteristics - Part 6-5: Graphene-based materials - Contact and sheet resistance: transmission line measurement

Standard Details

IEC TS 62607-6-5:2022(E) establishes a standardized method to determine the key control characteristicscontact resistance, and sheet resistancefor graphene-based materials and other two-dimensional materials by atransmission line measurement.The method uses test structures applied to the 2D material by photolithographic methods consisting of several metal electrodes with increasing spacing between the electrodes. By a measurement of the voltage drop between different pairs of electrodes, sheet resistance and contact resistance can be calculated.The method can be applied to any other two-dimensional materials which are subject to electrical metal contact on top of the materials. The method provides accurate and reproducible results, if the electrical contact formed between the two-dimensional material and the metal electrodes provides ohmic contact property.

General Information

Status : ACTIVE
Standard Type: Main
Document No: IEC TS 62607-6-5:2022
Document Year: 2022
Pages: 23
Edition: 1.0
  • Section Volume:
  • TC 113 Nanotechnology for electrotechnical products and systems

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IEC TS 62607-6-5:2022
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