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Status : Active
Standard Type : Main
Document No : ISO 24639:2022
Document Year : 2022
Pages : 15
Edition : 1
Section Volume : Analytical electron microscopy (ISO/TC 202/SC 3.)
This document specifies a calibration procedure of the energy step and the energy scale for electron energy loss spectroscopy in (scanning) transmission electron microscopes to an uncertainty of ±3 % for the energy range 0 eV to 3 000 eV.
This document is intended for electron energy loss spectroscopy with transmitted electrons through sufficiently electron transparent samples, such as a thin foil sample, and is not designed for backscattered electrons from a bulk sample.