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Status : Active
Standard Type : Main
Document No : ISO 25178-605:2025
Document Year : 2025
Pages : 16
Edition : 2
This document specifies the design and metrological characteristics of point autofocus probe (PAP) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.