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26/30510433 DC

Draft BS EN 62047-54 Ed.1.0 Micro-electromechanical devices - Part 54: Silicon based MEMS fabrication technology - Test method of microstructure tensile

General Information

Status : Definitive
Standard Type: Main
Document No: 26/30510433 DC
Document Year: 9
Pages: 18
  • Section Volume:
  • GBM21 Electronic Components & Devices (GMB21)
  • ICS:
  • 31.080.01 Semiconductor devices in general

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Definitive
26/30510433 DC
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