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Status : Active
Standard Type : Main
Document No : ISO 14644-2:2015
Document Year : 2015
Pages : 14
Edition : 2
Section Volume : Cleanrooms and associated controlled environments (ISO/TC 209.)
ISO 14644-2:2015 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles (particles smaller than 0,1µm) will be addressed in a separate standard.
