Knowledge Gateway
Unlock your learning potential with industry insights and standards that matter. Share your email to begin.
Unlock your learning potential with industry insights and standards that matter. Share your email to begin.
Status : Withdrawn
Standard Type : Main
Document No : ISO 14644-15:2017
Document Year : 2017
Pages : 21
Edition : 1
Section Volume : Cleanrooms and associated controlled environments (ISO/TC 209.)
ISO 14644-15:2017 provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (see ISO 14644‑8).
The following are outside the scope of ISO 14644-15:2017:
- health and safety requirements;
- compatibility with cleaning agents and techniques;
- cleanability;
- biocontamination;
- specific requirements of equipment and materials for processes and products;
- design details of equipment.