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Status : Active
Standard Type : Main
Document No : ISO/TR 23247-100:2025
Document Year : 2025
Pages : 15
Edition : 1
Section Volume : Industrial data (ISO/TC 184/SC 4.)
This document describes a digital twin for monitoring and controlling the semiconductor ingot growth process. The use case is analysed and designed using the ISO 23247 series. The result is a systematic view of the use case implementation and a high-level design of the digital twins, which can be directly implemented using the readily available tools and languages, including those supported by the relevant standards.